PDMS-supported graphene transfer using intermediary polymer layers

We propose a graphene transfer method based on chemical vapor deposited (CVD) graphene grown on copper foils. This transfer method utilizes a combination of a silicone elastomer (PDMS) and different intermediate polymer layers depending on the process requirements. We use polystyrene and polystyrene/photoresist intermediary layers for dry and wet graphene release. PMMA intermediary layer is applied for bubbling-assisted graphene transfer. The elastomer layer serves as an excellent solid support for electrochemical graphene delamination. Graphene-based field effect transistors (GFETs) were fabricated and characterized using this process. Raman spectroscopy was used in order to verify a successful transfer.