Title :
Membrane-supported CPW with mounted active devices
Author :
Liu, W.Y. ; Steenson, D. ; Steer, M.B.
Author_Institution :
Sch. of Electr. & Comput. Eng., Leeds Univ., UK
fDate :
4/1/2001 12:00:00 AM
Abstract :
This paper reports the fabrication of printed circuit lines on a 5 μm thick membrane that minimizes dielectric loss and effectively eliminates surface modes, both of which are important for operation at millimeter-wave and submillimeter-wave frequencies. The relatively low-cost low-temperature process uses a photosensitive resin (SU-8) to form the membrane and enables devices to be mounted on it.
Keywords :
coplanar waveguides; dielectric losses; mechanical stability; membranes; micromachining; millimetre wave circuits; photolithography; printed circuit manufacture; submillimetre wave circuits; 5 micron; EHF; SU-8; THF; dielectric loss minimisation; low-cost microfabrication; low-temperature process; membrane-supported CPW; millimeter-wave frequencies; mounted active devices; photosensitive resin; planar printed circuits; printed circuit lines; submillimeter-wave frequencies; surface modes elimination; suspended CPW; Biomembranes; Coplanar waveguides; Dielectric losses; Distributed parameter circuits; Fabrication; Frequency; Planar transmission lines; Printed circuits; Resins; Silver;
Journal_Title :
Microwave and Wireless Components Letters, IEEE
DOI :
10.1109/7260.916332
