DocumentCode :
1467376
Title :
Optical microresonator sensor systems
Author :
Venkatesh, S.
Volume :
58
Issue :
5
fYear :
1988
Abstract :
Over the past few years a number of advances have been made towards the development of a new type of optical sensor based on the activation and detection by optical means of resonant vibrations in simple mechanical devices. This paper describes three strands of technology¿resonator sensing, optical fibre systems and silicon micromachining¿the judicious interweaving of which underlies the most promising of these advances; it then presents a review of the published work to date and ends with a personal view of possible future developments.
fLanguage :
English
Journal_Title :
Electronic and Radio Engineers, Journal of the Institution of
Publisher :
iet
ISSN :
0267-1689
Type :
jour
DOI :
10.1049/jiere.1988.0044
Filename :
5261711
Link To Document :
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