Title :
Patterning Poly(3-Hexylthiophene) in the Sub-50-nm Region by Nanoimprint Lithography
Author :
Scarpa, Giuseppe ; Abdellah, Alaa ; Exner, Armin ; Harrer, Stefan ; Blanco, Guillermo Penso ; Wiedemann, Wolfgang ; Schmidt-Mende, Lukas ; Lugli, Paolo
Author_Institution :
Dept. of Electr. Eng. & Inf. Technol., Tech. Univ. Munchen, Munich, Germany
fDate :
5/1/2011 12:00:00 AM
Abstract :
We use thermal and room temperature nanoimprint lithography (NIL) for directly patterning the photoactive polymer poly(3-hexylthiophene-2,5-diyl) (P3HT) in the sub-50-nm region. Different types of molds were used to directly imprint the desired structures into P3HT thin films. Good pattern transfer is achieved independent of the presence of other underlying polymer layers or the type of substrate incorporated. Further, we discuss the future application of this technology to the fabrication of ordered heterojuction organic photovoltaic devices and demonstrate that the NIL process involved does not damage the polymer or alter its chemical or electrical properties.
Keywords :
nanolithography; nanopatterning; organic semiconductors; polymer films; polymers; semiconductor thin films; soft lithography; nanoimprint lithography; ordered heterojuction organic photovoltaic devices; pattern transfer; photoactive polymer poly(3-hexylthiophene-2,5-diyl); thin films; Chemical processes; Chemical technology; Fabrication; Nanolithography; Organic chemicals; Photovoltaic systems; Polymers; Solar power generation; Substrates; Thin films; 5-diyl) (P3HT); Nanoimprint lithography (NIL); nanostructuring; organic photovoltaic devices (OPVs); organic semiconductors; poly(3-hexylthiophene-2;
Journal_Title :
Nanotechnology, IEEE Transactions on
DOI :
10.1109/TNANO.2010.2048433