Electric impedance spectroscopy using microchannels with integrated metal electrodes

Author

Ayliffe, H. Edward ; Frazier, A. Bruno ; Rabbitt, R.D.

Author_Institution

Dept. of Bioeng., Utah Univ., Salt Lake City, UT, USA

Volume

8

Issue

1

fYear

1999

fDate

3/1/1999 12:00:00 AM

Firstpage

50

Lastpage

57

Abstract

Microelectric impedance measurement systems containing microchannels with integrated gold electrodes were fabricated to enable EI measurements of femtoliter (10^-15) volumes of liquid or gas. The microinstruments were characterized using samples of air, partially deionized water, and saline solutions with various ionic concentrations over the frequency range of 100 Hz to 2 MHz. Resulting spectral patterns varied systemically as a function of ionic concentration. In addition to industrial sensing applications, this technology may prove to be beneficial in monitoring microsystems utilizing on-chip fluid chemistry, measuring the dielectric dispersion of polymer solutions, and determining the electrical properties of isolated biological materials

Keywords

biosensors; electric impedance measurement; microelectrodes; microsensors; 100 Hz to 2 MHz; Au; air; biological cells; deionized water; electric impedance spectroscopy; integrated metal electrode; ionic concentration; microchannel; microelectric impedance measurement system; microinstrument; saline solution; Chemical technology; Electrochemical impedance spectroscopy; Electrodes; Frequency; Gold; Impedance measurement; Isolation technology; Microchannel; Plastics industry; Volume measurement;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/84.749402

Filename

749402