MEMS Hall effect pressure sensor

A novel micromachined pressure sensor is reported. The sensor works based on the Hall effect. The structure and fabrication process of this sensor are presented. During measurement, the applied pressure changes from 30 to 110 kPa. Test results show that the output Hall voltage of the sensor increases linearly with the pressure applied on the membrane and the sensitivity is 22.8 V/hPa. Furthermore, it is found that the output voltage is composed of two parts: the Hall voltage and the offset voltage. The offset voltage also changes with the applied pressure, but is much smaller than the Hall voltage.