Title :
Model Regularization for High-Mix Control
Author_Institution :
Intel Corp., Chandler, AZ, USA
fDate :
5/1/2010 12:00:00 AM
Abstract :
Past solutions to the multicontext run-to-run control problem are examined, especially in how they attempt to resolve ill-posedness of the model that leads to a lack of observability. The specific models examined in this paper are assumed to contain a combination of terms, each partitioned by a different context. It is shown that none of the past approaches adequately addresses the observability issue. This lack of observability has been known to cause sporadic excursions in practice due to the phenomena of estimation error drift. In this paper, a regularization scheme is presented that is shown to address this issue. A novel aspect of the proposed approach is the use of model augmentation versus model reduction or forcing reference values. The resulting regularized models are amenable to a variety of recursive estimation schemes. Last, simulations and production data are used to validate the behavior of the proposed approach.
Keywords :
integrated circuit manufacture; observability; process control; recursive estimation; semiconductor process modelling; estimation error drift; high mix control; ill posedness; model augmentation; model reduction; model regularization; multicontext run-to-run control problem; observability; recursive estimation; reference values; regularization scheme; semiconductor manufacturing; semiconductor processes; Additive noise; Context awareness; Context modeling; Estimation error; Observability; Production; Recursive estimation; Reduced order systems; Semiconductor device modeling; Target tracking; High-mix control; model regularization; observability; run-to-run control;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2010.2041388