Title :
Enhanced perpendicular coercive force of CoCr film formed on a very thin initial sublayer
Author :
Hirono, Shigeru ; Furuya, Akinori
Author_Institution :
Appl. Electron. Lab., NTT, Ibaraki, Japan
fDate :
11/1/1988 12:00:00 AM
Abstract :
Perpendicular coercivity of CoCr sputtered films on Ti adhesive layers decreases drastically as RF sputtering power increases. A very thin CoCr sublayer deposited at low power enhances the coercivity of the succeeding CoCr layer. Magnetic properties and segregated microstructures show that the initial segregated microstructure is inherited by the main CoCr layer even though the RF sputtering power changes during the sputtering process. Its segregated microstructure is enhanced by the initial 100-Å segregated structure
Keywords :
chromium alloys; cobalt alloys; coercive force; crystal microstructure; magnetic thin films; sputtered coatings; 100 A; CoCr film; RF sputtering power; Ti adhesive layers; initial sublayer; perpendicular coercive force; segregated microstructures; segregated structure; sputtering process; Coercive force; Magnetic anisotropy; Magnetic films; Magnetic properties; Microstructure; Perpendicular magnetic anisotropy; Radio frequency; Saturation magnetization; Sputtering; Substrates;
Journal_Title :
Magnetics, IEEE Transactions on
