Measurements of frequency fluctuations in aluminum nitride contour-mode resonators

Author

Miller, Nate ; Piazza, Gianluca

Author_Institution

Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA

Volume

61

Issue

6

fYear

2014

fDate

Jun-14

Firstpage

913

Lastpage

919

Abstract

As part of the current drive to engineer miniaturized monolithic high-performance microelectromechanical-enabled oscillators, there is a need for further study of frequency fluctuations in microelectromechanical resonators. To this end, we present the measurement of frequency fluctuations for 128 aluminum nitride contour-mode resonators. The measurements show that fluctuations are sufficiently large to play an important role in oscillator performance. These results were obtained for the first time from vector network analyzer measurements and are accompanied by an analysis of the experimental setup.

Keywords

III-V semiconductors; frequency measurement; micromechanical resonators; network analysers; oscillators; wide band gap semiconductors; AlN; aluminum nitride contour-mode resonator; frequency fluctuation measurement; microelectromechanical resonator; miniaturized monolithic microelectromechanical-enabled oscillator; vector network analyzer; Frequency measurement; Noise measurement; Phase measurement; Phase noise; Resonant frequency;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/TUFFC.2014.2987

Filename

6819207