In-situ measurement of permeability during rotational magnetic annealing of CoZrNb

Author

Yip, Y. ; Vos, M.J. ; Lu, M. ; Dugas, M.P. ; Judy, J.H.

Author_Institution

Dept. of Electr. Eng., Minnesota Univ., Minneapolis, MN, USA

Volume

24

Issue

6

fYear

1988

fDate

11/1/1988 12:00:00 AM

Firstpage

3072

Lastpage

3074

Abstract

A method has been developed to monitor the change in initial permeability while a sample is being annealed in a rotating magnetic field. RF-sputtered thin films of CoZrNb were placed within a sensing coil that can withstand high temperatures. The self-inductance of the coil was monitored during annealing. The inductance of the coil is a function of the sample permeability. The change in initial permeability as a function of annealing temperature time, and sample deposition conditions was investigated. It was found that there is a range of critical temperatures in which the permeability of the sample increased rapidly, which depends on the deposition temperature of the thin film

Keywords

cobalt alloys; ferromagnetic properties of substances; magnetic annealing; magnetic permeability; magnetic permeability measurement; magnetic thin films; niobium alloys; sputtered coatings; zirconium alloys; CoZrNb; RF-sputtered thin films; deposition temperature; in situ measurement; permeability; rotational magnetic annealing; self-inductance; sensing coil; Annealing; Coils; Magnetic field measurement; Monitoring; Permeability measurement; Rotation measurement; Temperature dependence; Temperature distribution; Temperature sensors; Transistors;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.92338

Filename

92338