DocumentCode

1490183

Title

Review of thickness-shear mode quartz resonator sensors for temperature and pressure

Author

EerNisse, Errol P. ; Wiggins, Robert B.

Author_Institution

Quartzdyne, Inc.

Volume

1

Issue

1

fYear

2001

fDate

6/1/2001 12:00:00 AM

Firstpage

79

Lastpage

87

Keywords

Acoustic sensors; Acoustic transducers; Acoustic waves; Packaging; Pressure measurement; Shape; Stability; Stress; Temperature sensors; Vibrations;

fLanguage

English

Journal_Title

Sensors Journal, IEEE

Publisher

ieee

ISSN

1530-437X

Type

jour

DOI

10.1109/JSEN.2001.923590

Filename

923590