A novel air-bridge type gate-data line-crossover reducing signal delay for large-size TFT-LCD panel

Author

Park, Jin-Woo ; Kang, Ji-Hoon ; Lee, Min-Cheol ; Han, Min-Koo

Author_Institution

Sch. of Electr. Eng., Seoul Nat. Univ., South Korea

Volume

48

Issue

6

fYear

2001

fDate

6/1/2001 12:00:00 AM

Firstpage

1070

Lastpage

1074

Abstract

A new gate-to-data line-crossover employing an air-bridge has been proposed and fabricated in order to reduce the line-crossing capacitance. The proposed structure is composed of a low-dielectric air-gap between the gate and data line-crossover while the conventional one employs an oxide as a dielectric material. The capacitance between the gate and data line in the TFT-LCD panel is decreased considerably due to the low-dielectric air-gap. The signal delay of the new panel structure is reduced by about ten times compared with that of the conventional panel. The mechanical stability of the new panel structure passivated with an oxide is comparable with the conventional one

Keywords

capacitance; delays; flat panel displays; large screen displays; liquid crystal displays; mechanical stability; thin film transistors; air-bridge type gate-data line-crossover; large-size TFT-LCD panel; line-crossing capacitance; low-dielectric air-gap; mechanical stability; signal delay; Air gaps; Aluminum; Capacitance; Delay lines; Dielectric materials; Passivation; Polyimides; Resists; Stress; Thermal stability;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/16.925228

Filename

925228