• DocumentCode
    1494883
  • Title

    GaAs-compatible surface-micromachined RF MEMS switches

  • Author

    Hyman, D. ; Schmitz, A. ; Warneke, B. ; Hsu, T.Y. ; Lam, J. ; Brown, J. ; Schaffner, J. ; Walston, A. ; Loo, R.Y. ; Tangonan, G.L. ; Mehregany, M. ; Lee, J.

  • Author_Institution
    HRL Labs., Malibu, CA, USA
  • Volume
    35
  • Issue
    3
  • fYear
    1999
  • fDate
    2/4/1999 12:00:00 AM
  • Firstpage
    224
  • Lastpage
    226
  • Abstract
    A MEMS switch has been developed for microwave applications. The switch has an actuation of 30 V, a response time of 20 μs, and mechanical robustness to withstand 109 actuations. An RF performance with >50 dB isolation below 2 GHz and <0.2 dB insertion loss from DC to 40 GHz has been measured
  • Keywords
    microactuators; micromachining; microwave switches; semiconductor switches; 0 to 40 GHz; 20 mus; 30 V; RF MEMS switches; actuation; insertion loss; isolation; mechanical robustness; microwave applications; response time; surface micromachining;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19990032
  • Filename
    755933
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1494883