• DocumentCode
    1494985
  • Title

    Terahertz time-domain spectroscopy of films fabricated from SU-8

  • Author

    Arscott, S. ; Garet, F. ; Mounaix, P. ; Duvillaret, L. ; Coutaz, J.-L. ; Lippens, D.

  • Author_Institution
    Inst. d´´Electron. et de Microelectron., Univ. des Sci. et Tech. de Lille Flandres Artois, Villeneuve d´´Ascq, France
  • Volume
    35
  • Issue
    3
  • fYear
    1999
  • fDate
    2/4/1999 12:00:00 AM
  • Firstpage
    243
  • Lastpage
    244
  • Abstract
    Terahertz time-domain spectroscopy has been used to characterise the refractive index and absorption coefficient of samples fabricated using the negative photoresist SU-8, in the frequency range 0.1-1.6 THz. At a frequency of 1 THz, the corresponding dielectric constant and dielectric loss tangent are 2.9 and 6.3×10-6, respectively
  • Keywords
    absorption coefficients; dielectric losses; permittivity; photoresists; polymer films; refractive index; submillimetre wave spectra; 0.1 to 1.6 THz; SU-8 negative photoresist; THF; absorption coefficient; dielectric constant; dielectric loss tangent; refractive index; terahertz time-domain spectroscopy;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19990146
  • Filename
    755946
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1494985