• DocumentCode
    149590
  • Title

    Stress sensing based on one dimensional photonic crystal nano beam

  • Author

    Fu-Li Hsiao ; Zhen-hong Yang

  • Author_Institution
    Inst. of Photonics, Nat. Changhua Univ. of Educ., Changhua, Taiwan
  • fYear
    2014
  • fDate
    21-24 April 2014
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    We demonstrate a one-dimensional photonic crystal nano beam. The structure is formed by silicon waveguide. A Si3N4 layer is deposited above the waveguide. The thermal stress between Si/Si3N4 induces the deformation of beam and affects the transmission peak of slow light mode. The thermal stress can be detected by measuring the shift of peaks in transmission spectrum.
  • Keywords
    nickel compounds; photonic crystals; silicon compounds; thermal stresses; waveguides; Si3N4; one-dimensional photonic crystal nano beam; silicon waveguide; stress sensing; thermal stress; Conferences; Decision support systems; Information processing; Intelligent sensors; photonic crystal; sensor; slow light; thermal stress; waveguide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Intelligent Sensors, Sensor Networks and Information Processing (ISSNIP), 2014 IEEE Ninth International Conference on
  • Conference_Location
    Singapore
  • Print_ISBN
    978-1-4799-2842-2
  • Type

    conf

  • DOI
    10.1109/ISSNIP.2014.6827615
  • Filename
    6827615
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=149590