3D UV-microforming: principles and applications

A low-cost surface micromachining technology is described and examples provided of its application to microsensor and microactuator fabrication. The new technology 3D UV-macroforming, combines depth ultraviolet (UV) lithographic patterning of very thick photoresists and electrodeposition of structural materials into the patterned resist moulds. Neither UV lithography nor electrodeposition needs expensive or special equipment. Micromechanical components with high structures can be directly manufactured onto the system surface. Movable three-dimensional (3D) microstructures with a high aspect ratio can be obtained by combining the 3D UV-microforming process with a sacrificial layer technique. As an example of an advanced application in microsystem technology, the fabrication of triaxial accelerometers is presented, using titanium as a sacrificial layer and nickel as the structural material