Title :
Optimization of thin-film YBa2Cu3O7 deposition by DC sputtering onto sapphire substrates
Author :
Tomlinson, E.J. ; Barber, Z.H. ; Morris, G.W. ; Somekh, R.E. ; Evetts, J.E.
Author_Institution :
Dept. of Mater. Sci. & Metall., Cambridge Univ., UK
fDate :
3/1/1989 12:00:00 AM
Abstract :
A report is presented on the deposition of YBa2Cu3 O7 thin films onto epitaxial magnesia-coated single-crystal sapphire substrates at deposition temperatures in the range of 600°C-850°C. The dependence of film composition on sputtering parameters was investigated using a UHV DC magnetron sputter deposition system with both composite metal and ceramic oxide targets. Films deposited onto epitaxial magnesia are compared to those deposited directly onto sapphire and yttria-stabilized zirconia. The degree of control required for the sputter deposition of YBaCuO thin films at elevated temperatures is shown
Keywords :
barium compounds; high-temperature superconductors; sputter deposition; superconducting thin films; yttrium compounds; 600 to 850 degC; Al2O3; DC sputtering; MgO; Y2O3-ZrO2; YBa2Cu3O7 deposition; deposition temperatures; epitaxial magnesia-coated single-crystal sapphire substrates; film composition; high temperature superconductivity; thin films; yttria-stabilized zirconia; Ceramics; Heat treatment; High temperature superconductors; Magnesium compounds; Magnetic films; Sputtering; Substrates; Superconducting epitaxial layers; Superconducting films; Superconducting magnets;
Journal_Title :
Magnetics, IEEE Transactions on
