DocumentCode :
1501944
Title :
Calculation of Electron Energy Distribution Functions From Electron Swarm Parameters Using Artificial Neural Network in \\hbox {SF}_{6} and Argon
Author :
Tezcan, S.S. ; Akcayol, M. Ali ; Ozerdem, Ozgur Cemal ; Dincer, M.S.
Author_Institution :
Dept. of Electr. & Electron. Eng., Gazi Univ., Ankara, Turkey
Volume :
38
Issue :
9
fYear :
2010
Firstpage :
2332
Lastpage :
2339
Abstract :
This paper proposes an artificial neural network (ANN) to obtain the electron energy distribution functions (EEDFs) in SF6 and argon from the following: 1) mean energies; 2) the drift velocities; and 3) other related swarm data. In order to obtain the required swarm data, the electron swarm behavior in SF6 and argon is analyzed over the range of the density-reduced electric field strength E/N from 50 to 800 Td from a Boltzmann equation analysis based on the finite difference method under a steady-state Townsend condition. A comparison between the EEDFs calculated by the Boltzmann equation and by ANN for various values of E/N suggests that the proposed ANN yields good agreement of EEDFs with those of the Boltzmann equation solution results.
Keywords :
Boltzmann equation; argon; finite difference methods; neural nets; plasma drift waves; plasma transport processes; sulphur compounds; Ar; Boltzmann equation analysis; SF6; artificial neural network; density-reduced electric field strength; drift velocities; electron energy distribution functions; electron swarm behavior; electron swarm parameters; finite difference method; mean energies; steady-state Townsend condition; swarm data; Argon; Artificial neural networks; Boltzmann equation; Chemical lasers; Distribution functions; Electron mobility; Ionization; Plasma stability; Steady-state; Sulfur hexafluoride; $hbox{SF}_{6}$; Argon; boltzmann equation; neural networks;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/TPS.2010.2049588
Filename :
5471224
Link To Document :
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