DocumentCode
1505155
Title
Integrated optical refractometer based on waveguide bend loss
Author
Veldhuis, G.J. ; van der Veen, L.E.W. ; Lambeck, P.V.
Author_Institution
Philips Res. Lab., Eindhoven, Netherlands
Volume
17
Issue
5
fYear
1999
fDate
5/1/1999 12:00:00 AM
Firstpage
857
Lastpage
864
Abstract
This paper reports on a refractometer, which is based on measuring the throughput of a bent channel waveguide. A new type of channel waveguide, designed in SiON technology makes the throughput strongly dependent on the refractive index of a measurand fluid. This new waveguide can be designed for any measurand refractive index range between 1.00<n<2.00. In addition, monomode input and multimode output waveguides matching the sensor waveguide were designed which significantly simplify the fabrication process by eliminating the occurrence of critical alignment steps during the processing. Preliminary measurements on the device show a high sensing resolution of Δn=1×10-5 in an aqueous solution with a refractive index of n=1.37. The sensor characteristics, make this simple sensor very interesting for controlling a chemical concentration during chemical processes, e.g., in the food and beverages industry
Keywords
chemical sensors; chemical variables measurement; integrated optics; optical fabrication; optical sensors; refractive index measurement; silicon compounds; waveguide discontinuities; SiON; SiON technology; aqueous solution; bent channel waveguide; beverages industry; channel waveguide; chemical concentration; chemical control; chemical processes; critical alignment steps; fabrication process; food industry; high sensing resolution; integrated optical refractometer; measurand fluid; measurand refractive index range; monomode input; multimode output waveguides; refractive index; sensor waveguide; throughput; waveguide bend loss; waveguide design; Chemical processes; Chemical sensors; Integrated optics; Optical losses; Optical refraction; Optical sensors; Optical waveguides; Refractive index; Sensor phenomena and characterization; Throughput;
fLanguage
English
Journal_Title
Lightwave Technology, Journal of
Publisher
ieee
ISSN
0733-8724
Type
jour
DOI
10.1109/50.762904
Filename
762904
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