• DocumentCode
    1508685
  • Title

    Micromachined H-plane horn antenna manufactured using thick SU-8 photoresist

  • Author

    Murad, N.A. ; Lancaster, Michael J. ; Gardner, Peter ; Ke, M.L. ; Wang, Yannan

  • Author_Institution
    Electron. Electr. & Comput. Eng., Univ. of Birmingham, UK
  • Volume
    46
  • Issue
    11
  • fYear
    2010
  • Firstpage
    743
  • Lastpage
    745
  • Abstract
    A micromachined H-plane horn antenna designed at 63 GHz is presented. The horn is integrated with an air filled coaxial line to ridge waveguide transition with the ridge waveguide feeding the horn. The antenna is constructed by bonding five layers of gold coated SU-8 photoresist, each 200 m-thick. The performance has been validated experimentally using on-wafer probe measurements. A good match is achieved with low return loss obtained at the designed operating frequency. This proposed design is to be used in three-dimensional phased array beamformers.
  • Keywords
    beam steering; coaxial cables; horn antennas; micromachining; photoresists; ridge waveguides; SU-8 photoresist; air filled coaxial line; micromachined H-plane horn antenna manufacturing; on-wafer probe measurements; ridge waveguide; size 200 mum; three-dimensional phased array beamformers;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el.2010.1054
  • Filename
    5479691