DocumentCode
1509366
Title
Effect of surface cleaning of substrate on the exchange coupling field in Ni-Fe/25at%Ni-Mn films
Author
Tsunoda, M. ; Konoto, M. ; Uneyama, K. ; Takahashi, M.
Author_Institution
Dept. of Electron. Eng., Tohoku Univ., Sendai, Japan
Volume
33
Issue
5
fYear
1997
fDate
9/1/1997 12:00:00 AM
Firstpage
3688
Lastpage
3690
Abstract
The effect of surface cleaning of Si(100) substrate on the exchange coupling field, Hex was investigated for Ni-Fe/25 at% Ni-Mn films. Hex measured at room temperature rapidly increased when the substrate surface was slightly (about 10 Å) etched by RF plasma just before film deposition, especially in the films with very thin (50 Å) Ni-Fe layer. From structural analysis of the films, and view of the temperature dependence of Hex, it was concluded that the increase of Hex was caused by the enlargement of γ-Ni-Mn grains epitaxially grown on the underlying Ni-Fe grains
Keywords
exchange interactions (electron); ferromagnetic materials; grain size; interface magnetism; iron alloys; magnetic multilayers; manganese alloys; nickel alloys; silicon; surface cleaning; γ-Ni-Mn grains; 10 A; 50 A; Ni-Fe/25at%Ni-Mn films; NiFe-NiMn; Si; Si(100) substrate; exchange coupling field; film deposition; structural analysis; substrate; surface cleaning; temperature dependence; Anisotropic magnetoresistance; Couplings; Dry etching; Epitaxial growth; Magnetic anisotropy; Magnetic films; Perpendicular magnetic anisotropy; Saturation magnetization; Substrates; Surface cleaning;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/20.619539
Filename
619539
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