Micromachined spiral inductors using UV-LIGA techniques

Author

Sadler, Daniel J. ; Gupta, Sukirti ; Ahn, Chong H.

Author_Institution

Dept. of Electr. & Comput. Eng., Cincinnati Univ., OH, USA

Volume

37

Issue

4

fYear

2001

fDate

7/1/2001 12:00:00 AM

Firstpage

2897

Lastpage

2899

Abstract

Integrated planar inductors are fundamentally important to the development of fully integrated magnetic MEMS devices as well as for RF and microwave applications. For many applications, it is important that inductors be CMOS compatible, as this allows for the possible addition of on-chip circuitry. Spiral inductors are typically the simplest inductors to fabricate and are often suited for use as smart sensors and electronic components. In this paper we have designed, fabricated, characterized and compared several different types of spiral inductors, all of which were fabricated by means of a thick photoresist lithography process referred to as UV-LIGA

Keywords

LIGA; coils; inductors; magnetic cores; magnetic microwave devices; magnetomechanical effects; micromechanical devices; ultraviolet lithography; CMOS compatibility; UV-LIGA techniques; integrated planar inductors; magnetic MEMS devices; micromachined spiral inductors; microwave applications; on-chip circuitry; smart sensors; thick photoresist lithography process; Circuits; Electronic components; Inductors; Intelligent sensors; Magnetic devices; Microelectromechanical devices; Microwave devices; Radio frequency; Resists; Spirals;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.951340

Filename

951340