DocumentCode
1541706
Title
Fabrication of YBaCuO junctions by the irradiation of focused ion beam
Author
Shiga, H. ; Soutome, Y. ; Okabe, Y.
Author_Institution
Res. Center for Adv. Sci. & Technol., Tokyo Univ., Japan
Volume
9
Issue
2
fYear
1999
fDate
6/1/1999 12:00:00 AM
Firstpage
2890
Lastpage
2893
Abstract
We have fabricated Josephson junctions in YBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// (YBaCuO) thin films by the irradiation of focused ion beam (FIB). We used Be/sup 2+/ ions with the energy of 200 keV. When the fluence of Be/sup 2+/ ions was 1.2/spl times/10/sup 16/ ions/cm/sup 2/, the I-V characteristics of the junctions at 4.2 K showed RSJ-like characteristics with the excess current. The I/sub c/R/sub n/ product of the junctions was 1.1 mV at 6.3 K. Shapiro steps up to 20th step could be observed by the irradiation of 8.47 GHz microwave at 6.3 K. The magnetic modulation curve of the junction at 4.2 K was similar to the Fraunhofer pattern. These characteristics remained unaltered after preservation in a desiccator for 6 months.
Keywords
Josephson effect; barium compounds; focused ion beam technology; high-temperature superconductors; superconducting thin films; yttrium compounds; 200 keV; 4.2 to 6.3 K; 8.47 GHz; Fraunhofer pattern; I-V characteristics; Josephson junction; RSJ model; Shapiro step; YBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// thin film; YBa/sub 2/Cu/sub 3/O/sub 7/; focused ion beam irradiation; magnetic modulation; microwave irradiation; Fabrication; Gold; Ion beams; Josephson junctions; Lithography; Pulsed laser deposition; Substrates; Superconducting films; Transistors; Yttrium barium copper oxide;
fLanguage
English
Journal_Title
Applied Superconductivity, IEEE Transactions on
Publisher
ieee
ISSN
1051-8223
Type
jour
DOI
10.1109/77.783633
Filename
783633
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