Title :
Reliability of segmented edge seal ring for RF devices
Author :
Gambino, Jeffrey P. ; Graf, R.S. ; Malinowski, J.C. ; Cote, A.R. ; Guthrie, W.H. ; Watson, K.M. ; Chapman, P.F. ; Sims, K.K. ; Levy, M.D. ; Aoki, Toyohiro ; Mason, G.A. ; Jaffe, Mark D.
Author_Institution :
IBM Microelectron., Essex Junction, VT, USA
Abstract :
RF devices are sensitive to noise coupling between devices. One source of coupling is the edge seal ring. We propose using a segmented guard ring to reduce coupling between devices. We demonstrate that the segmented guard ring is reliable for a 0.18 μm RF technology.
Keywords :
electromagnetic interference; integrated circuit noise; integrated circuit packaging; integrated circuit reliability; seals (stoppers); RF device; noise coupling; segmented edge seal ring reliability; segmented guard ring; size 0.18 mum; Contamination; Logic gates; Mobile communication; Pollution measurement; Radio frequency; Seals; Stress;
Conference_Titel :
Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC), 2014 IEEE International
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4799-5016-4
DOI :
10.1109/IITC.2014.6831836
