Finite element eddy current analysis in RF plasma devices with metal cooling system

Author

Mckideche, M.R. ; Féliachi, M. ; Develey, G. ; Srairi, K.

Author_Institution

Bejaia Univ., Algeria

Volume

33

Issue

2

fYear

1997

fDate

3/1/1997 12:00:00 AM

Firstpage

2195

Lastpage

2198

Abstract

An axially symmetric model for the calculation of eddy currents in 3D in inductively coupled RF plasma devices (plasma torch) with metal cooling systems is presented. This model is combining an analytical approach of the induced currents in the metallic parts of the cooling system with a finite element analysis previously elaborated in the case of a quartz confinement tube. The effect of temperature and motion on the electric conductivity is taken into account. The model is based on finite element method

Keywords

cooling; eddy currents; electrical conductivity; finite element analysis; plasma radiofrequency heating; plasma torches; RF plasma devices; axially symmetric model; electric conductivity; finite element eddy current analysis; induced currents; inductively coupled device; metal cooling system; metallic parts; motion effect; plasma torch; quartz confinement tube; temperature effect; Cooling; Eddy currents; Equations; Finite element methods; Plasma confinement; Plasma devices; Plasma temperature; Radio frequency; Temperature distribution; Thermal conductivity;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.582768

Filename

582768