Title :
Fabrication of YBaCuO wiring for YBaCuO trilayer junctions
Author :
Sato, H. ; Akoh, H. ; Onizawa, T. ; Hohkawa, K. ; Tomioka, A. ; Kawabe, U.
Author_Institution :
Electrotech. Lab., Ibaraki, Japan
fDate :
6/1/1999 12:00:00 AM
Abstract :
We have investigated the advancement of the trilayer junction fabrication process toward the YBaCuO/PrBaCuO/YBaCuO trilayer junctions with the YBaCuO wiring layers. Run-to-run variation of J/sub c/ was obtained to be factor three for the YBaCuO junctions with Au wiring layer on the two substrates. We found that c-axis oriented YBaCuO films with T/sub c/ of 85 K were developed on an [110] SrTiO/sub 3/ substrates with CeO/sub 2//MgO buffer layers. From these results, we have attempted to fabricate YBaCuO trilayer junctions with the YBaCuO wiring layer.
Keywords :
Josephson effect; barium compounds; critical current density (superconductivity); high-temperature superconductors; yttrium compounds; Au wiring; CeO/sub 2//MgO buffer layer; Josephson junction; SrTiO/sub 3/ substrate; YBaCuO film; YBaCuO wiring; YBaCuO-PrBaCuO-YBaCuO; YBaCuO/PrBaCuO/YBaCuO trilayer junction; critical current density; fabrication; high temperature superconductor; Buffer layers; Fabrication; Gold; High temperature superconductors; Josephson junctions; Substrates; Superconducting films; Superconducting integrated circuits; Wiring; Yttrium barium copper oxide;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
