Title :
The tacking CCD: a new CCD concept
Author :
Bakker, Jacques G C ; Esser, Leonard J M ; Peek, Herman L. ; Sweeney, Colm J. ; Kokshoorn, Andre L. ; Theuwissen, Albert J P
Author_Institution :
Philips Res. Lab., Eindhoven, Netherlands
fDate :
5/1/1991 12:00:00 AM
Abstract :
The tacking CCD is a new type of charge transport mechanism that is suitable for junction- and MOS-type CCDs. A specific form, the trenched tacking CCD (TTCCD), promises high pixel density and high charge handling capability per unit of surface area. The charge handling capability is improved by using a trench to increase the charge storage area. With the new design concept it becomes possible to put the gates entirely into trenches, while simultaneously using the trenches as channel stops. The TTCCD structure is suitable for making new types of solid-state image sensors with increased light sensitivity, and it may be possible to incorporate a vertical overflow drain. First samples of the TTCCD have been realized, and its functionality has been confirmed
Keywords :
CCD image sensors; charge-coupled devices; doping profiles; MOS-type; channel stops; charge storage area; charge transport mechanism; dopant profiles; high charge handling capability; high pixel density; junction type CCD; solid-state image sensors; trenched tacking CCD; vertical overflow drain; Charge carriers; Charge coupled devices; Charge transfer; Delay lines; Electrodes; HDTV; Image sensors; Noise level; Optical filters; Solid state circuits;
Journal_Title :
Electron Devices, IEEE Transactions on
