Title :
A micromachined high-Q X-band resonator
Author :
Papapolymerou, John ; Cheng, Jui-Ching ; East, Jack ; Katehi, Linda P B
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
fDate :
6/1/1997 12:00:00 AM
Abstract :
The authors present a new structure which can be used as a microwave high-Q resonator for the development of narrow-band low-loss filters in a planar environment. The resonator is made of a low-loss micromachined cavity which is easy to integrate with monolithic circuits. Compared to conventional metallic resonators, the performance of this resonator is similar, but the weight and size are significantly reduced
Keywords :
Q-factor; band-pass filters; cavity resonators; micromachining; microwave devices; microwave filters; passive filters; resonator filters; SHF; X-band resonator; high-Q resonator; low-loss micromachined cavity; micromachined resonator; monolithic circuits; narrowband low-loss filters; planar environment; size reduction; weight reduction; Band pass filters; Circuits; Dielectrics; Micromachining; Microstrip; Moment methods; Q factor; Resonator filters; Silicon; Transmission line matrix methods;
Journal_Title :
Microwave and Guided Wave Letters, IEEE
