Title :
Improvement of pressure sensing element with polycrystalline silicone strain gages
Author :
Nefed´ev, D.I. ; Volkov, Valentyn S. ; Evdokimov, S.P.
Author_Institution :
Penza State Univ., Penza, Russia
Abstract :
The article describes use of polycrystalline silicone mesa strain gages for pressure sensors. The new sensor element construction with improving characteristics is described.
Keywords :
pressure sensors; silicones; strain gauges; polycrystalline silicone mesa strain gages; pressure sensors; Educational institutions; Electronic mail; Sensor phenomena and characterization; Silicon; Strain;
Conference_Titel :
Actual Problems of Electron Devices Engineering (APEDE), 2014 International Conference on
Conference_Location :
Saratov
Print_ISBN :
978-1-4799-3437-9
DOI :
10.1109/APEDE.2014.6958246
