DocumentCode
1551942
Title
Operation of surface-tension self-assembled 3D micro-optomechanical torsion mirror scanner
Author
Syms, R.R.A.
Author_Institution
Dept. of Electr. & Electron. Eng., Imperial Coll. of Sci., Technol. & Med., London, UK
Volume
35
Issue
14
fYear
1999
fDate
7/8/1999 12:00:00 AM
Firstpage
1157
Lastpage
1158
Abstract
The operation of an electrostatically-driven 3D micro-optomechanical resonant torsion mirror scanner is described. The device is fabricated in bonded silicon-on-insulator and self-assembled by out-of plane rotation powered by a surface tension torque obtained by photoresist melting. A scan angle of 16/spl deg/ is obtained at a drive frequency of 2.6 kHz using a voltage of 175 V.
Keywords
surface tension; 175 V; 2.6 kHz; 3D micro-optomechanical resonant torsion mirror scanner; drive frequency; electrostatically-driven; n bonded silicon-on-insulator; out-of plane rotation; photoresist melting; scan angle; self-assembled; surface tension torque; surface-tension self-assembled 3D micro-optomechanical torsion mirror scanner;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19990833
Filename
788939
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