Title :
A 3-D integral equation-based approach to the analysis of real-life MMICs application to microelectromechanical systems
Author :
Farina, Marco ; Rozzi, Tullio
Author_Institution :
Dipt. di Elettronica e Autom., Ancona Univ., Italy
fDate :
12/1/2001 12:00:00 AM
Abstract :
In this paper, we introduce a three-dimensional method-of-moments approach, suitable for the analysis of real-life monolithic circuits for microwave/millimeter waves. It shares the flexibility and the efficiency of the currently available spectral-domain commercial simulators, while allowing all metallizations to have finite thickness and finite conductivity and the ability to handle dielectric discontinuities. The method is successfully applied to several structures, like metal-insulator-metal capacitor, spiral inductors, and microelectromechanical capacitive switches in the 1-50-GHz frequency range
Keywords :
MIM devices; MIMIC; MMIC; inductors; integral equations; method of moments; micromechanical devices; spectral-domain analysis; 1 to 50 GHz; 3D integral equation-based approach; MEMS; MMICs; dielectric discontinuities; finite conductivity; finite thickness; metal-insulator-metal capacitor; method-of-moments approach; microelectromechanical capacitive switches; microelectromechanical systems; spectral-domain commercial simulators; spiral inductors; Circuit simulation; Conductivity; Dielectrics; Integral equations; Metallization; Microwave circuits; Microwave theory and techniques; Millimeter wave circuits; Millimeter wave technology; Moment methods;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
