Statics and dynamics of giant magnetostrictive Tb/sub x/Fe/sub 1-x//Fe/sub 0.6/Co/sub 0.4/ uniaxial multilayers for MEMS applications

Summary form only given. In the present paper, artificially nanostructured uniaxial giant magnetostrictive (Tb/sub x/Fe/sub 1-x//Fe/sub 0.6/Co/sub 0.4/)*n multilayers have been investigated for future MEMS purposes. For this goal, such multilayer films have been RF sputtered onto glass and silicon <100> under various conditions to obtain different Tb ratios in the TbFe layers, with and without a bias field applied along the substrate in order to induce a magnetic easy axis. The authors show that uni-axial magnetostrictive TbFe/FeCo films were obtained with a greatly enhanced magnetoelastic coupling coefficient (b/sup /spl gamma/,2//spl ap/18 MPa) compared to TbFe/Fe (b/sup /spl gamma/,2//spl ap/11 MPa) without an annealing post process.