Megasonic Cleaning of Blanket and Patterned Samples in Carbonated Ammonia Solutions for Enhanced Particle Removal and Reduced Feature Damage

Author

Zhenxing Han ; Keswani, Manish ; Raghavan, Srinath

Author_Institution

Dept. of Chem. & Environ. Eng., Univ. of Arizona, Tucson, AZ, USA

Volume

26

Issue

3

fYear

2013

fDate

Aug. 2013

Firstpage

400

Lastpage

405

Abstract

An investigation of particle removal efficiency and feature damage has been conducted in NH₄OH/NH₄HCO₃ cleaning solutions irradiated with megasonic energy. By adjusting the pH of the solution in the range of 8.2 - 8.5, high particle removal efficiency (PRE) was achieved while feature damage was reduced significantly. The sonoluminescence data collected from NH₄OH and NH₄OH/NH₄HCO₃ solutions indicate significant suppression of transient cavitation in alkaline solutions containing aqueous CO₂.

Keywords

ammonia; carbon compounds; cavitation; sonoluminescence; surface cleaning; CO₂; NH₄OH; NH₄OH-NH₄HCO₃; alkaline solutions; aqueous CO2; carbonated ammonia cleaning solutions; feature damage; megasonic energy; particle removal efficiency; sonoluminescence data; transient cavitation; ${rm CO}_2$ (aq.); Megasonic cleaning; feature damage; particle removal efficiency (PRE); sonoluminescence (SL);

fLanguage

English

Journal_Title

Semiconductor Manufacturing, IEEE Transactions on

Publisher

ieee

ISSN

0894-6507

Type

jour

DOI

10.1109/TSM.2013.2271641

Filename

6549164