DocumentCode :
1566491
Title :
A novel silicon micron amperometric gas sensor
Author :
Maseeh, F. ; Tierney, M.J. ; Chu, W.S. ; Joseph, J. ; Kim, H.-O.L. ; Otagawa, T.
Author_Institution :
Teknekron Sensor Dev. Corp., Menlo Park, CA, USA
fYear :
1991
Firstpage :
359
Lastpage :
362
Abstract :
The authors report on a silicon-based amperometric microelectrochemical gas sensor, based on an innovative design. This sensor shows a faster response (<0.5 s) to NO gas than other types of gas sensors, with good repeatability. Because the substrate is made porous only on the working electrode, the bulk of the substrate can be rather thick to support the very thin silicon porous membrane. The thin membrane allows a shorter and therefore quicker diffusion path to the electrode compared to, for example, thicker porous ceramic substrates which have tortuous path pores. Response and recovery times are therefore reduced over back-cell sensors based on porous ceramic sensors. A detection limit of 5 p.p.m. was achieved for the first generation of these sensors.<>
Keywords :
electric sensing devices; elemental semiconductors; gas sensors; integrated circuit technology; nitrogen compounds; semiconductor technology; silicon; NO gas; Si; diffusion; microelectrochemical gas sensor; micron amperometric gas sensor; porous membrane; porous substrate; recovery times; working electrode; Amperometric sensors; Biomembranes; Delay; Electrodes; Gas detectors; Gases; Liquids; Polymers; Sensor phenomena and characterization; Silicon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-87942-585-7
Type :
conf
DOI :
10.1109/SENSOR.1991.148884
Filename :
148884
Link To Document :
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