RF sputtered FeCoN soft magnetic thin films with high resistivity

Author

Hai Jiang ; Yingjian Chen ; Yiming Huai

Author_Institution

ReadRite Corp., Fremont, CA, USA

fYear

2002

Abstract

Summary form only given. FeCo alloy has the highest magnetic moment among the existing magnetic materials. How to make FeCo based soft magnetic thin films has attracted a lot of attention recently. In this experiment, a series of /spl sim/45 nm Fe/sub 70/Co/sub 30/N thin films were prepared on a glass wafer at room temperature by reactive RF sputtering with nitrogen. A 40 Oe field was applied during deposition to induce a desired uniaxial anisotropy in the films. The optimization conditions include nitrogen flow rate percentage and sputtering pressure. The magnetic properties of the thin films were measured by the B-H loop tracer and the structure of the thin films was investigated by XRD. The resistivity was measured by the four-point probe method.

Keywords

X-ray diffraction; alloying additions; cobalt alloys; electrical resistivity; ferromagnetic materials; induced anisotropy (magnetic); iron alloys; magnetic heads; magnetic thin films; nitrogen; soft magnetic materials; sputter deposition; sputtered coatings; 45 nm; B-H loop tracer; Fe/sub 70/Co/sub 30/N; Fe/sub 70/Co/sub 30/N thin films; FeCo alloy; FeCoN soft magnetic thin films; N; N flow rate percentage; RF sputtered FeCoN thin films; XRD; four-point probe; glass wafer; high resistivity; magnetic properties; nitrogen; optimization conditions; reactive RF sputtering; sputtering pressure; thin film structure; uniaxial anisotropy; Conductivity; Glass; Iron; Magnetic films; Magnetic materials; Magnetic moments; Nitrogen; Radio frequency; Sputtering; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 2002. INTERMAG Europe 2002. Digest of Technical Papers. 2002 IEEE International

Conference_Location

Amsterdam, The Netherlands

Print_ISBN

0-7803-7365-0

Type

conf

DOI

10.1109/INTMAG.2002.1001259

Filename

1001259