DocumentCode
1572415
Title
Self-assembling electrical networks: an application of micromachining technology
Author
Cohn, M.B. ; Kim, C.J. ; Pisano, A.P.
Author_Institution
California Univ., Berkeley, CA, USA
fYear
1991
Firstpage
490
Lastpage
493
Abstract
It is noted that the recent applications of silicon processing technology to the manufacture of micro-mechanical devices may allow engineering of self-assembling systems. Preliminary experiments show that regular two-dimensional lattices of at least 1000 millimeter-sized elements can be mechanically self-assembled using a method analogous to crystal annealing. Physical considerations suggest that conditions become more favorable to the process as size decreases, and give rise to guidelines for optimal design. Applications to IC manufacturing are discussed. The method requires large numbers of identical, freely moving discrete elements fabricated with a controlled three-dimensional geometry, and thus may be an area in which micromachining technology can be used to advantage.<>
Keywords
integrated circuit technology; micromechanical devices; optimisation; semiconductor technology; simulated annealing; 1000 mm; IC manufacturing; controlled three-dimensional geometry; crystal annealing; freely moving discrete elements; micromachining technology; optimal design; regular two-dimensional lattices; self-assembling electrical networks; self-assembling systems; Annealing; Application software; Assembly systems; Circuit testing; Computer aided manufacturing; Lattices; Micromachining; Silicon; Steady-state; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location
San Francisco, CA, USA
Print_ISBN
0-87942-585-7
Type
conf
DOI
10.1109/SENSOR.1991.148919
Filename
148919
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