Design and fabrication of a MEMS sensors array for detecting explosive particles

Author

Kong, Deyi ; Tao, Yongchun ; Mei, Tao ; Ni, Lin ; Zhang, Tao ; Lu, Wei ; Zhang, Zhengyong ; Wang, Rui

Author_Institution

Inst. of Intelligent Machines, Chinese Acad. of Sci., Hefei, China

Volume

4

fYear

2004

Firstpage

3611

Abstract

In this work, a design of MEMS sensors array which is capable of detecting explosive particles is presented. The array consists of 12 silicon beams, on each beam there are a heating element and a temperature sensing element. All silicon beams can be heated up to melting point of particular kind of explosive by the heating elements, while the sensing elements are used to monitor the temperature change of each beam caused by heat absorption of the explosive particles when they melt. The MEMS sensors array has been fabricated and tested, experimental results show that it is capable of detecting TNT and RDX particles of several micrograms.

Keywords

array signal processing; explosions; heating elements; microsensors; particle detectors; temperature sensors; MEMS sensors array; explosive particle detection; heating element; silicon beams; temperature sensing element; Absorption; Explosives; Fabrication; Heating; Micromechanical devices; Particle beams; Sensor arrays; Silicon; Temperature measurement; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Intelligent Control and Automation, 2004. WCICA 2004. Fifth World Congress on

Print_ISBN

0-7803-8273-0

Type

conf

DOI

10.1109/WCICA.2004.1343267

Filename

1343267