Title :
Trace gas analysis by diode laser cavity ring-down spectroscopy
Author :
Yan, Wen-Bin ; Krusen, Calvin ; Dudek, John ; Lehmann, Kevin ; Rabinowitz, P.
Author_Institution :
Tiger Opt., Warrington, PA, USA
fDate :
6/24/1905 12:00:00 AM
Abstract :
The first commercial analyzer based on cavity ringdown spectroscopy (CRDS) was developed to perform fast and reliable analysis of ultra trace gas impurities. The complete analytical system, the MTO-1000, is capable of measuring moisture from 200 parts-per-trillion (PPT) to 5 ppm. Trace moisture test data will be presented to demonstrate the speed of response, sensitivity, and accuracy of the analyzer.
Keywords :
integrated circuit manufacture; measurement by laser beam; moisture measurement; process monitoring; semiconductor technology; spectrochemical analysis; MTO-1000 analytical system; accuracy; continuous monitoring; diode laser cavity ring-down spectroscopy; laser spectroscopy; process analyzers; response speed; semiconductor manufacture; sensitivity; trace gas analysis; trace moisture test data; ultra trace gas impurities; Diode lasers; Electromagnetic wave absorption; Gases; Moisture; Monitoring; Optical sensors; Pollution measurement; Ring lasers; Semiconductor lasers; Spectroscopy;
Conference_Titel :
Advanced Semiconductor Manufacturing 2002 IEEE/SEMI Conference and Workshop
Print_ISBN :
0-7803-7158-5
DOI :
10.1109/ASMC.2002.1001626
