Title :
A new modal mode controlling method for a surface format surrounding mass accelerometer
Author :
Yamada, K. ; Kuriyama, T.
Author_Institution :
NEC Corp., Kanagawa, Japan
Abstract :
A new model mode controlling method for a surface format surrounding mass accelerometer is presented. The controlling method can attain a stable feedback control without imposing a degree-of-freedom limitation on the sensor structure by using a multi-force balancing system. The controlling is based on the finite element method simulation result for the accelerometer structure and the fact that almost all vibrations occurring in the accelerometer in a normal vibrational environment can be expressed by a very small number of vibrational mode series. For this work, an application for the surface format surrounding mass accelerometer is presented as a demonstration.<>
Keywords :
accelerometers; feedback; finite element analysis; micromechanical devices; vibration control; vibrations; Si-SiO/sub 2/; degree-of-freedom limitation; fabrication; feedback control; finite element method; machine control; mass accelerometer; modal mode control; multi-force balancing; sensor structure; simulation; surface format; vibrations; Accelerometers; Control systems; Feedback control; Force control; Frequency; Laboratories; Motion control; Sensor systems; Vibration control; Weight control;
Conference_Titel :
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-87942-585-7
DOI :
10.1109/SENSOR.1991.148965