DocumentCode
1591798
Title
Chemical sensors fabricated in CMOS-MEMS technology
Author
Voiculescu, Ioana
Author_Institution
Mech. Eng. Dept., City Coll. of New York, New York, NY, USA
fYear
2010
Abstract
This presentation is an overview of standard Integrated Circuits technology that enables the integration of the chemical sensors with the necessary driving and signal conditioning circuitry on the same chip. A variety of Complementary Metal Oxide Semiconductor (CMOS)-based chemical sensors found in the literature and the microprocessing technologic steps necessary for the integration of microelectromechanical systems (MEMS) sensors in CMOS technology are explained in this presentation.
Keywords
CMOS integrated circuits; chemical sensors; driver circuits; microfabrication; microsensors; signal processing equipment; CMOS-MEMS technology; chemical sensor fabrication; complementary metal oxide semiconductor; driver circuit; microelectromechanical sensor; signal conditioning circuitry; standard integrated circuit technology; CMOS process; CMOS technology; Chemical sensors; Chemical technology; Costs; Integrated circuit technology; Intelligent sensors; Micromachining; Micromechanical devices; Packaging;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Electronics (ICSE), 2010 IEEE International Conference on
Conference_Location
Melaka
Print_ISBN
978-1-4244-6608-5
Type
conf
DOI
10.1109/SMELEC.2010.5549499
Filename
5549499
Link To Document