DocumentCode
159288
Title
Monolithic integration of photonic devices in SiGe BiCMOS
Author
Zimmermann, L. ; Knoll, D. ; Lischke, S. ; Petousi, D. ; Kroh, M. ; Winzer, G. ; Heinemann, B. ; Ostrovskyy, P. ; Micusik, D. ; Lisker, M. ; Fursenko, O. ; Marschmeyer, S. ; Yamamoto, Yusaku ; Voigt, K. ; Wohlfeil, B. ; Tillack, Bernd ; Petermann, K.
Author_Institution
IHP Im Technologiepark, Frankfurt (Oder), Germany
fYear
2014
fDate
27-29 Aug. 2014
Firstpage
102
Lastpage
103
Abstract
We review the development status of device integration in photonic BiCMOS technology. Basic photonic device performance and results of a first fully-integrated technology learning cycle shall be presented.
Keywords
BiCMOS integrated circuits; germanium alloys; integrated optics; integrated optoelectronics; reviews; silicon alloys; SiGe BiCMOS; fully-integrated technology learning cycle; monolithic integration; photonic devices; BiCMOS integrated circuits; Modulation; Performance evaluation; Phase shifters; Photodiodes; Photonics; Silicon; Integrated optoelectronic circuits; Optoelectronics; Silicon photonics;
fLanguage
English
Publisher
ieee
Conference_Titel
Group IV Photonics (GFP), 2014 IEEE 11th International Conference on
Conference_Location
Paris
Print_ISBN
978-1-4799-2282-6
Type
conf
DOI
10.1109/Group4.2014.6961947
Filename
6961947
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