Title :
Design and characterization of a linear motion piezoelectric microactuator
Author :
Wang, Z.X. ; Jouaneh, M.K. ; Dornfeld, D.
Author_Institution :
Dept. of Mech. Eng., California Univ., CA, USA
Abstract :
The design and characterization of a fast linear microactuator is described. The microactuator is constructed of number of piezoelectric plates that are placed on both sides of a sliding mass. Actuation of the plates in an accordionlike fashion provides a linear displacement of ±0.36 mm. In addition, it has force capability of over 80 g, and is provided with both position and force-sensing capabilities. Characterization of the dynamic performance of the microactuator is presented, and initial tests on it show that it has a second-order system behavior with nonlinear response. The resolution of the microactuator is affected by the performance of the capacitive-type position sensor, and varies from 3 μm to less than 0.6 μm
Keywords :
force control; force measurement; piezoelectric devices; position control; position measurement; dynamic performance; force control; force measurement; force-sensing; linear motion piezoelectric microactuator; nonlinear response; piezoelectric plates; position control; position measurement; position sensing; second-order system; sliding mass; Application software; Computer aided manufacturing; Deburring; Magnetic levitation; Manipulator dynamics; Mechanical engineering; Microactuators; Micromanipulators; Piezoelectric actuators; Service robots;
Conference_Titel :
Robotics and Automation, 1989. Proceedings., 1989 IEEE International Conference on
Conference_Location :
Scottsdale, AZ
Print_ISBN :
0-8186-1938-4
DOI :
10.1109/ROBOT.1989.100222
