Title :
Fluorene-type thin films synthesized under biphenyl and ethylene RF plasma
Author :
Mansuroglu, Dogan ; Manolache, Sorin
Author_Institution :
Dept. of Phys., Middle East Tech. Univ., Ankara, Turkey
Abstract :
The mixture of biphenyl (C12H10) and ethylene (C2H4) plasma was used to synthesize fluorene (C13H10)-type films by a 13.56 MHz capacitive coupled RF plasma system. The thin films were deposited on glass slides. Changes of layers were investigated when a negative bias potential was applied to the holder of the substrate. The chemical environment was explored by residual gas analysis (RGA) mass spectrometry. Deposited layers were investigated by UV-visible spectroscopy, Atomic Force Microscope (AFM) and ellipsometry. The thin films were doped with Iodine (I2) for different time periods.
Keywords :
atomic force microscopy; conducting polymers; doping; ellipsometry; iodine; mass spectroscopic chemical analysis; mixtures; plasma deposition; polymer films; ultraviolet spectra; visible spectra; AFM; I; SiO2; UV-visible spectroscopy; atomic force microscopy; biphenyl mixtures; capacitive coupled RF plasma deposition; conjugated polymers; deposited layers; ellipsometry; ethylene mixtures; fluorene-type thin films; frequency 13.56 MHz; glass slides; iodine doping; mass spectrometry; negative bias potential; residual gas analysis; substrate holder; Atomic layer deposition; Films; Polymers; Spectroscopy; USA Councils;
Conference_Titel :
Nanotechnology (IEEE-NANO), 2012 12th IEEE Conference on
Conference_Location :
Birmingham
Print_ISBN :
978-1-4673-2198-3
DOI :
10.1109/NANO.2012.6322000
