Methodology based on experiments and 3-D EM simulations for frequency characterization of buried capacitors

Embedded capacitor technology is receiving considerable attention due to the size reduction, increase of the integration density and the number of functionalities of electronic circuits. This technology enables to reduce the parasitic inductances because of its shorter leads that allow increasing the operating frequency towards higher frequencies. In this paper, we describe the methodology used to study the frequency behavior of a buried capacitor structure mounted in a parallel configuration using measurements and 3-D electromagnetic (EM) simulations. Two cases are presented using EM simulations. The first case presents a constant value of the dielectric permittivity and the second allows validating the final model, by taking into account the frequency dependence of the dielectric permittivity.