Title :
Low-drift gas sensor with on-chip instrumentation
Author :
Schoneberg, U. ; Dura, H.G. ; Hosticka, B.J. ; Mokwa, W.
Author_Institution :
Fraunhofer Inst. of Microelectron. Circuits & Syst., Duisburg, Germany
Abstract :
A hydrogen gas sensor device with an on-chip switched capacitor readout circuit is presented. This technique permits AC operation of capacitive gas sensors. It was demonstrated that on-chip analog instrumentation not only makes sensor readout and interfacing possible, but it can also improve long-term sensor behavior.<>
Keywords :
electric sensing devices; gas sensors; hydrogen; switched capacitor networks; AC operation; H/sub 2/ sensor; capacitive gas sensors; long-term sensor behavior; low-drift gas sensor; on-chip analog instrumentation; on-chip instrumentation; on-chip switched capacitor readout circuit; Capacitance; Electrodes; Gas detectors; Instruments; Leakage current; MOS capacitors; Palladium; Pulse amplifiers; Switched capacitor circuits; Voltage;
Conference_Titel :
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-87942-585-7
DOI :
10.1109/SENSOR.1991.149062
