Title :
Science and technology of piezoelectric/diamond heterostructures for monolithically integrated high performance MEMS/NEMS/CMOS devices
Author :
Auciello, O. ; Sumant, A.V. ; Hiller, J. ; Kabius, B. ; Ma, Z. ; Srinivasan, S.
Abstract :
This paper describes the fundamental and applied science performed to integrate piezoelectric PbZrxTi1??xO3 and AlN films with a novel mechanically robust ultrananocrystalline diamond layer to enable a new generation of low voltage / high-performance piezoactuated hybrid piezoelectric/diamond MEMS/NEMS devices.
Keywords :
Adhesives; CMOS technology; Laboratories; Materials science and technology; Micromechanical devices; Nanoelectromechanical systems; Piezoelectric devices; Piezoelectric films; Piezoelectric polarization; Young´s modulus;
Conference_Titel :
Applications of Ferroelectrics, 2008. ISAF 2008. 17th IEEE International Symposium on the
Conference_Location :
Santa Re, NM, USA
Print_ISBN :
978-1-4244-2744-4
Electronic_ISBN :
1099-4734
DOI :
10.1109/ISAF.2008.4693745
