• DocumentCode
    1606189
  • Title

    Epitaxial piezoelectric thin films on flexible substrates

  • Author

    Shelton, C.T. ; Dandeneau, C. ; Matias, V. ; Gibbons, B.J.

  • Author_Institution
    Materials Science Program, Department of Mechanical Engineering, Oregon State University, Corvallis, 97331, USA
  • Volume
    2
  • fYear
    2008
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    It is well known that the piezoelectric properties of a thin film can be influenced by crystallographic texture. At the extreme case, epitaxial thin films can be deposited on single crystal substrates (with appropriate lattice matching) to effectively achieve a single crystal thin film. Here, the maximum advantage of orientation dependence is found. Typically this has required small, expensive single crystalline substrates. In the past 10 years however, the technique of Ion Beam Assisted Deposition (IBAD) has been developed for applying a biaxial textured template to an arbitrary smooth surface. That is, biaxially textured MgO (~10 nm thick) can be deposited on a flexible, polycrystalline or amorphous substrate. This has opened up a new realm of materials integration possibilities, with the prime example being high-temperature superconducting wires. Here, the same template is utilized for deposition of epitaxial piezoelectric thin films onto flexible substrates.
  • Keywords
    Amorphous materials; Crystallization; Crystallography; Ion beams; Lattices; Piezoelectric films; Sputtering; Substrates; Superconducting materials; Surface texture;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applications of Ferroelectrics, 2008. ISAF 2008. 17th IEEE International Symposium on the
  • Conference_Location
    Santa Re, NM, USA
  • ISSN
    1099-4734
  • Print_ISBN
    978-1-4244-2744-4
  • Electronic_ISBN
    1099-4734
  • Type

    conf

  • DOI
    10.1109/ISAF.2008.4693800
  • Filename
    4693800