DocumentCode
1606189
Title
Epitaxial piezoelectric thin films on flexible substrates
Author
Shelton, C.T. ; Dandeneau, C. ; Matias, V. ; Gibbons, B.J.
Author_Institution
Materials Science Program, Department of Mechanical Engineering, Oregon State University, Corvallis, 97331, USA
Volume
2
fYear
2008
Firstpage
1
Lastpage
2
Abstract
It is well known that the piezoelectric properties of a thin film can be influenced by crystallographic texture. At the extreme case, epitaxial thin films can be deposited on single crystal substrates (with appropriate lattice matching) to effectively achieve a single crystal thin film. Here, the maximum advantage of orientation dependence is found. Typically this has required small, expensive single crystalline substrates. In the past 10 years however, the technique of Ion Beam Assisted Deposition (IBAD) has been developed for applying a biaxial textured template to an arbitrary smooth surface. That is, biaxially textured MgO (~10 nm thick) can be deposited on a flexible, polycrystalline or amorphous substrate. This has opened up a new realm of materials integration possibilities, with the prime example being high-temperature superconducting wires. Here, the same template is utilized for deposition of epitaxial piezoelectric thin films onto flexible substrates.
Keywords
Amorphous materials; Crystallization; Crystallography; Ion beams; Lattices; Piezoelectric films; Sputtering; Substrates; Superconducting materials; Surface texture;
fLanguage
English
Publisher
ieee
Conference_Titel
Applications of Ferroelectrics, 2008. ISAF 2008. 17th IEEE International Symposium on the
Conference_Location
Santa Re, NM, USA
ISSN
1099-4734
Print_ISBN
978-1-4244-2744-4
Electronic_ISBN
1099-4734
Type
conf
DOI
10.1109/ISAF.2008.4693800
Filename
4693800
Link To Document