Title :
PZT thick films for MEMS
Author :
Gebhardt, S. ; Partsch, U. ; Schönecker, A.
Author_Institution :
Department of Intelligent Materials and Systems, Fraunhofer Institute for Ceramic Technologies and Systems, Winterbergstr. 28, 0177 Dresden, Germany
Abstract :
Al2O3, silicon and low temperature cofired ceramics (LTCC) are key functional materials, forming the substrate basis in microsystems technologies. They allow for three dimensional component integration, high robustness and excellent reliability. The combination of these substrate materials with piezoelectric films offer advanced sensor, actuator and ultrasonic transducer solutions which open up new fields of applications. We developed a PZT thick film paste with excellent dielectric and electromechanical properties. In combination with special electrode and barrier layers a technology was achieved allowing for the development of custom products.
Keywords :
Aluminum oxide; Ceramics; Dielectric materials; Dielectric substrates; Micromechanical devices; Piezoelectric materials; Robustness; Silicon; Temperature sensors; Thick films;
Conference_Titel :
Applications of Ferroelectrics, 2008. ISAF 2008. 17th IEEE International Symposium on the
Conference_Location :
Santa Re, NM, USA
Print_ISBN :
978-1-4244-2744-4
Electronic_ISBN :
1099-4734
DOI :
10.1109/ISAF.2008.4693830
