Investigation of sensitive and restoring parameters for nanostructured Al2O3 based humidity sensors

Author

Shimanovich, D.L.

Author_Institution

Belarusian State Univ. of Inf. & Radioelectron. Belarus, Minsk, Belarus

fYear

2014

fDate

3-5 Feb. 2014

Firstpage

72

Lastpage

74

Abstract

The volumetric-surface variant of the capacitive MDM (metal-dielectric-metal) structure of the vertical direction based on high-ordered matrices of free anodic porous alumina membranes for applications in humidity sensing elements was designed. The improved humidity sensitivity, reduced response and recovery time over a wide humidity range were obtained due to preparing of alumina membranes with open-ended and widened pores without the barrier layer. Such technological approach allows to eliminate the effect of the electrolyte anions embedded in pore walls on the adsorption and desorption processes in humidity sensing elements.

Keywords

adsorption; alumina; capacitive sensors; desorption; electrolytes; humidity sensors; matrix algebra; membranes; nanosensors; nanostructured materials; porosity; Al₂O₃; adsorption process; capacitive MDM structure; desorption process; electrolyte anions; free anodic porous alumina membrane; high-ordered matrices; humidity sensing elements; humidity sensor; metal-dielectric-metal; open-ended pores; pore walls; recovery time reduction; response time reduction; volumetric surface variant; widened pores; Chemicals; Etching; Films; Humidity; Sensitivity; Sensors; Time factors; anodic porous alumina; humidity sensing element; membrane; recovery time; response time;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical and Electronic Engineering Conference (ElConRusNW), Proceedings of the 2014 IEEE NW Russia Young Researchers in

Conference_Location

St. Petersburg

Print_ISBN

978-1-4799-2593-3

Type

conf

DOI

10.1109/ElConRusNW.2014.6839205

Filename

6839205