DocumentCode

1609883

Title

Fabrication of Complex Integrated Waveguide Filters Using Electron Beam Lithography

Author

Millar, P. ; Liu, Xindong ; De La Rue, R. ; Aitchison, J.S.

Author_Institution

University of Glasgow

fYear

1998

Firstpage

334

Lastpage

334

Keywords

Electron beams; Filters; Lithography; Optical device fabrication;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Europe, 1998. 1998 CLEO/Europe. Conference on

Conference_Location

Glasgow, Scotland

Print_ISBN

0-7803-4233X

Type

conf

DOI

10.1109/CLEOE.1998.719511

Filename

719511