Title :
Fabrication of Complex Integrated Waveguide Filters Using Electron Beam Lithography
Author :
Millar, P. ; Liu, Xindong ; De La Rue, R. ; Aitchison, J.S.
Author_Institution :
University of Glasgow
Keywords :
Electron beams; Filters; Lithography; Optical device fabrication;
Conference_Titel :
Lasers and Electro-Optics Europe, 1998. 1998 CLEO/Europe. Conference on
Conference_Location :
Glasgow, Scotland
Print_ISBN :
0-7803-4233X
DOI :
10.1109/CLEOE.1998.719511
